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Single-Axis Linear Nanopositioners

¿¡¾î·ÎÅØÀÇ ´ÜÃà ¸®´Ï¾î ³ª³ëÆ÷Áö¼Å³Ê´Â ANT95-L¹× ANT130-LÀ» Æ÷ÇÔÇÕ´Ï´Ù. ÀÌ·¯ÇÑ Å©·Î½º ·Ñ·¯ º£¾î¸µ, ´ÙÀÌ·ºÆ® µå¶óÀÌºê ¸®´Ï¾î ½ºÅ×ÀÌÁö µÑ ´Ù 1nm ºÐÇØ´É, <1nm Á¤À§Ä¡ ¾ÈÁ¤¼º, 250nm Á¤È®¼ºÀ» Á¦°øÇÕ´Ï´Ù. ANT130-LÀÌ 35, 60, 110, 160mmÀÇ À̵¿±¸°£ ¹× 12kg±îÁöÀÇ ºÎÇϸ¦ Á¦°øÇÏ´Â ¹Ý¸é¿¡ ANT95-LÀº 25 ¶Ç´Â 50mmÀÇ À̵¿±¸°£ ¹× 5.0¶Ç´Â 7.0kgÀÇ ºÎÇϸ¦ Á¦°øÇÕ´Ï´Ù. ±×µéÀº ½ÇÇè½ÇÀ̳ª ¿¬Áß ¹«ÈÞ Á¦Á¶ ȯ°æ¿¡¼­ µ¿ÀÏÇÏ°Ô ¼³°èµÇ¾ú½À´Ï´Ù.

¿ì¼öÇÑ Á¤È®µµ, À§Ä¡ ¹Ýº¹µµ, Á¤À§Ä¡ ¾ÈÁ¤µµ´Â ³ôÀº ½Ã½ºÅÛ ºÐÇØ´ÉÀ» ¿ä±¸ÇÕ´Ï´Ù. ANT95-L¹× ANT130-L 1nm ÃÖ¼Ò ÁõºÐ ´Ü°è »çÀÌÁî´Â ÀÌ·¯ÇÑ ³ôÀº ¼öÁØÀÇ ¼º´ÉÀ» Á¦°øÇÕ´Ï´Ù. ³ôÀº Ç°Áú¿¡ ÀÇÇÑ ÈǸ¢ÇÑ Á¤À§Ä¡ ¾ÈÁ¤µµ, ¾ÈƼ Å©¸³ Å©·Î½º ·Ñ·¯ º£¾î¸µÀº Á¦Ç°ÀÇ ¼ö¸í µ¿¾È »ç½Ç»ó °ü¸®°¡ ÇÊ¿ä ¾ø´Â ÀÛµ¿À» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù. ¿¡¾î·ÎÅØÀÇ ´ÙÀÌ·ºÆ® µå¶óÀÌºê ±â¼úÀº ÀÌ·ÂÇö»ó ¶Ç´Â ¹é·¡½Ã°¡ ¾ø°í, Á¤È®ÇÏ°í ¹Ýº¹ÀûÀÎ ³ª³ë¹ÌÅÍ ±Ô¸ð ¸ð¼ÇÀ» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù.

¿¡¾î·ÎÅØÀÇ ³ª³ëÆ÷Áö¼Å³Ê´Â µ¶¸³Çü ´ÜÀ§ ¶Ç´Â ¿¡¾î·ÎÅØÀÇ ÀÚü ÄÁÆ®·Ñ·¯ ¹× µå¶óÀ̺긦 Æ÷ÇÔÇÏ¿© ¿ÏÀüÇÑ À§Ä¡ ÆÐÅ°Áö·Î Á¦°ø¹Þ½À´Ï´Ù.

ANT95-L NanoTranslation, Crossed-Roller Bearing
Linear Stage
ANT130-L NanoTranslation, Crossed-Roller Bearing
Linear Stage
nanotechnology nanotechnology motion control

¿¡¾î·ÎÅØÀÇ ³ª³ëÀ̵¿ (ANT95-L, ANT95-L-H) Å©·Î½º·Ñ·¯ ½ºÅ×ÀÌÁö´Â ¼Óµµ, Á¤È®µµ, ºÐÇØ´É, ¹Ýº¹Á¤¹Ðµµ ¹× »çÀÌÁ °áÇÕÇÏ¿´À¸¸ç 2°³ µî±ÞÀÇ Á¤È®µµ¸¦ Á¦°øÇÕ´Ï´Ù. ²ÙÁØÈ÷ Àα⸦ ¾ò°í ÀÖ´Â ANT ½ºÅ×ÀÌÁö Ç°¸ñÀÇ Çõ½ÅÁ¦Ç°À¸·Î¼­, ÀÌ·¯ÇÑ ¸®´Ï¾î ½ºÅ×ÀÌÁö´Â ¿¡¾î·ÎÅØÀÇ Àϼ¼´ë ANT ½Ã¸®Áî Á¦Ç°À» ´É°¡ÇÏ´Â Çâ»óµÈ ¸ð¼Ç¼º´ÉÀ» ½ÃÇöÇÏ°í ÀÖ½À´Ï´Ù. 5g °¡¼Óµµ, 500mm/s ¼Óµµ, Çâ»óµÈ ºÎÇÏ¿ë·®, ±×¸®°í Ç¥ÁØÈ­µÈ ¸¸´É º£À̽º ¸¶¿îÆà ÆÐÅÏ°ú °°ÀÌ Çâ»óµÈ Á¦Ç°¼º´ÉÀº Àü´Ü°è Á¦Ç° ´ëºñ ÈξÀ ±¤¹üÀ§ÇÑ ¿µ¿ªÀÇ Á¶ÇÕ¼º¿¡ ÀÌ·¯ÇÑ À¯¿¬ÇÑ ½ºÅ×ÀÌÁö Á¦Ç°±ºÀÇ »ç¿ëÀ» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù.

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ANT130-L ½Ã¸®Áî ½ºÅ×ÀÌÁö´Â ¼Óµµ, Á¤È®µµ, ºÐÇØ´É, ¹Ýº¹Á¤¹Ðµµ, ½Å·Ú¼º, À̵¿¿µ¿ª¿¡¼­ ÃÖ°í µî±ÞÀÇ ¼º´ÉÀ» Á¦°øÇÏ´Â Á¦Ç°À¸·Î¼­ 2°³ µî±ÞÀÇ Á¤È®µµ¸¦ Á¦°øÇÕ´Ï´Ù. Àú»óÀÇ ÇüÅÂ¿Í Å¹¿ùÇÑ ¼º´ÉƯ¼ºÀ» °¡Áö°í¼­, ANT130-LÀº °íµµÀÇ Á¤È®ÇÑ Á¤¿­, °Ë»ç, Æ÷Áö¼Å´×, ±×¸®°í ÃøÁ¤±â±â¸¦ À§ÇÑ ÃÖ»óÀÇ ¼Ö·ç¼Ç Á¦Ç°ÀÔ´Ï´Ù.

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1 nm Best-In-Class Resolution
linear tables

1 nm step plot for ANT95-L

1 nm Best-In-Class Resolution


1 nm step plot for ANT130-L

Max Travel
25, 50, 75, 100 mm
Accuracy
dia. 250 nanometers
Speed
500 mm/s
Load
7.0 kg
Max Travel
35, 60, 110, 160 mm
Accuracy
dia. 250 nanometers
Speed
350 mm/s
Load
12.0 kg


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