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| |
Travel |
50 mm |
100 mm |
150 mm |
Accuracy(1) |
Standard |
¡¾2.0 µm |
¡¾4.0 µm |
¡¾6.0 µm |
HALAR |
¡¾1.0 µm |
¡¾1.25 µm |
¡¾1.5 µm |
Resolution |
0.05 µm |
Repeatability (Bidirectional) (1) |
¡¾0.5 µm |
Straightness(2) |
¡¾0.25 µm |
¡¾0.35 µm |
¡¾0.45 µm |
Pitch(2) |
¡¾1 arc sec |
¡¾1.25 arc sec |
¡¾2 arc sec |
Roll(2) |
¡¾1 arc sec |
¡¾1.25 arc sec |
¡¾2 arc sec |
Yaw(2) |
¡¾1 arc sec |
¡¾1.25 arc sec |
¡¾2 arc sec |
Maximum Speed |
5 mm/rev |
50 mm/s |
Maximum Acceleration |
0.25 g |
Load Capacity(3) |
Vertical |
15 kg |
Operating Pressure |
80 psi |
Air Consumption |
¡Â40 slpm |
Material |
Aluminum |
MTBF (Mean Time Between Failure) |
15,000 Hours |
Notes: 1. Certified with each stage. 2. Specifications are for centered load. Other loading configurations will affect specifications. 3. Axis orientation for on-axis loading is listed. 4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 5. To protect air bearing against under-pressure condition, an in-line pressure switch tied to the motion controller is required. 6. Air supply must be clean, dry to 0¡ÆF dew point, and filtered to 0.25 µm or better.
Drive System |
Brushless Rotary Servomotor |
Feedback |
Noncontact Linear Encoder |
Maximum Bus Voltage |
up to 160 VDC |
Limit Switches |
5 V, Normally Closed |
Multi-Axis |
A3200 |
Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR |
Ensemble |
Ensemble MP/Ensemble CP/Ensemble HLe/Epaq |
Single Axis |
Soloist |
Soloist MP/Soloist CP/Soloist HLe |
Notes: 1. Linear amplifiers are required to achieve the listed specifications. Other options are available.
|
Ordering Example |
AirLift 115 |
-050 |
-LTX100 |
-BMS60-BRK |
-MT1 |
Series |
Travel Options |
Encoder |
Motor |
Mounting |
|
-050 -100 -150 |
-LTX100 |
-BMS60-BRK -BMS100-BRK |
-MT1 -MT2-050 -MT2-100 -MT2-150 |
AirLift 115 |
AirLift 115
|
Screw-driven, air bearing vertical stage |
Travel Options |
-050 |
50 mm travel |
-100 |
100 mm travel |
-150 |
150 mm travel
|
Encoder |
-LTX100 |
Linear encoder for AirLift 115; 0.05 micron line-driver output |
Motor |
-BMS60-BRK |
Brushless servomotor with connectors and brake |
-BMS100-BRK |
Brushless servomotor with connectors and brake |
Mounting |
-MT1 |
Mounting configuration 1; mounting surface perpendicular to axis motion |
-MT2-050 |
Mounting configuration 2; mounting surface parallel to axis motion; for 50 mm travel stage |
-MT2-100 |
Mounting configuration 2; mounting surface parallel to axis motion; for 100 mm travel stage |
-MT2-150 |
Mounting configuration 2; mounting surface parallel to axis motion; for 150 mm travel stage |
|