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¶Ù¾î³ ½ºÅ×ÀÌÁö Ư¼º ¶Ù¾î³ Á¤È®µµ, À§Ä¡¹Ýº¹µµ ¹× Á¤À§Ä¡ ¾ÈÁ¤¼ºÀº ³ôÀº ½Ã½ºÅÛ ºÐÇØ´ÉÀ» ÇÊ¿ä·Î ÇÕ´Ï´Ù. ANT130-5-V ½ºÅ×ÀÌÁöÀÇ »ê¾÷À» ¼±µµÇÏ´Â 2nmÀÇ ÃÖ¼Ò ÁõºÐ ´ÜÀ§´Â ³ôÀº ¼öÁØÀÇ ¼º´ÉÀ» Á¦°øÇÕ´Ï´Ù. °íÇ°ÁúÀÇ º¯Çü¹æÁö Å©·Î½º·Ñ·¯ º£¾î¸µÀ¸·Î Áö¿øµÇ´Â ¶Ù¾î³ Á¤À§Ä¡ ¾ÈÁ¤¼ºÀº Á¦Ç°ÀÇ ¼ö¸íÀÌ ´ÙÇÏ´Â µ¿¾È ½ÇÁúÀûÀ¸·Î À¯Áöº¸¼ö°¡ ÇÊ¿ä ¾ø´Â µ¿ÀÛÀ» ÇÒ ¼ö ÀÖ½À´Ï´Ù. ¿¡¾î·ÎÅØÀÇ ´ÙÀÌ·ºÆ® µå¶óÀÌºê ±â¼úÀº hysteresis ¶Ç´Â backlash°¡ ÀüÇô ¾ø¾î, Á¤È®ÇÏ°í ¹Ýº¹ °¡´ÉÇÑ ³ª³ë¹ÌÅÍ ¼öÁØÀÇ ¸ð¼ÇÀ» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù.
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Mechanical Specifications |
ANT130-5-V |
Travel |
5 mm |
Accuracy(1) |
Standard |
¡¾2 ¥ìm |
PLUS |
¡¾200 nm |
Resolution |
2 nm |
Repeatability (Bi-Directional) (1) |
Standard |
¡¾150 nm |
PLUS |
¡¾100 nm |
Repeatability (Uni-Directional) |
¡¾75 nm |
Straightness(2) |
¡¾1.0 ¥ìm (¡¾40 ¥ìin) |
Pitch(1) |
20 arc sec |
Roll |
10 arc sec |
Yaw(1) |
10 arc sec |
Maximum Speed |
75 mm/s (3 in/s) |
Maximum Acceleration |
0.7 g - 7 m/s2 (No Load) |
Settling Time |
See graphs for typical performance |
In-Position Stability(3) |
1 nm |
Maximum Force (Continuous) |
100 N |
Load Capacity(4) |
3.0 kg |
Moving Mass |
1.8 kg (4 lb) |
Stage Mass |
3.1 kg (7 lb) |
Material |
Aluminum Body/Black Hardcoat Finish/Black Anodize Finish |
MTBF (Mean Time Between Failure) |
30,000 Hours | Notes: 1. Certified with each stage. 2. Measured perpendicular or parallel to wedge direction. 3. In-Position Stability listing is 3 sigma value. 4. Assumes loading along axis of travel. 5. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 6. -PLUS requires the use of an Aerotech controller.
Electrical Specifications |
ANT130-5-V |
Drive System |
Brushless Linear Servomotor |
Feedback |
Noncontact Linear Encoder |
Maximum Bus Voltage |
¡¾40 VDC |
Limit Switches |
5 V, Normally Closed |
Home Switch |
Near Center |
Recommended Controller |
ANT130-5-V |
Multi-Axis |
A3200 |
Npaq-MXR Npaq MR-MXH Ndrive ML-MXH |
Ensemble |
Epaq-MXH Epaq MR-MXH Ensemble ML-MXH |
Single Axis |
Soloist |
Soloist ML-MXH | Notes: 1. Linear amplifiers are required to achieve the listed specifications. Other options are available
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Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25¡ÆC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Sales Engineering for more information.
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ANT130-5-V/ANT130-5-V-PLUS Mounting Plate Dimensions
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ANT130-5-V Series Vertical Lift Stage |
ANT130-5-V |
Aerotech¡¯s nanotranslation crossed-roller bearing vertical lift positioner
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Linear Stage Travel (X,Y) |
ANT130-5-V |
5 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits |
ANT130-5-V-PLUS |
5 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
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Accessories |
-MP-ANT130-5-V |
Breadboard mounting plate
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Output Cable Connectors |
-25DU |
Single 25-pin D connector (standard) |
-4DU-25DU |
4-pin HPD and 25-pin D connectors |
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V | |