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Brushless Direct-Drive ÃÖ°íÀÇ positioning ¼º´ÉÀ» À§ÇØ, WaferMax Z´Â ¿¡¾î·ÎÅØÀÇ BLMUC-½Ã¸®Áî brushless, slotless linear ¸ðÅ͸¦ »ç¿ëÇÕ´Ï´Ù. ÀÌ ¸ðÅÍ´Â brushless direct-drive ¸ðÅÍÀÇ ¸ðµç ÀåÁ¡À»- ¸¶¸ðµÇ´Â brush¿Í Á¤ºñ°¡ ÇÊ¿äÇÑ ±â¾î ¿(Öª)ÀÇ Üôî¤, ³ôÀº Á¤È®¼º ¹× ºü¸¥ ¼Óµµ - °¡Áö°í ÀÖ½À´Ï´Ù. ÀÌ°ÍÀº slotless, ironless ¼³°èÀ̱⠶§¹®¿¡, cogging°ú Åä¿ÀÅ© rippleÀÌ Àý´ë ¾ø½À´Ï´Ù. ÀÌ°ÍÀº WaferMax Z¸¦ À±°û motion, ¿øÈ°ÇÑ scan ¼Óµµ, ¶Ç´Â Á¤¹ÐÇÑ Á¡ÁøÀûÀÎ step¿¡ ÀÌ»óÀûÀ¸·Î ¸¸µì´Ï´Ù.
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Specifications
Model |
WaferMax Z |
Travel |
5 mm |
Motor Type |
Direct-drive brushless linear servomotor |
Bus Voltage |
up to 160 VDC |
Continuous Current |
Apk |
2.9 A |
Arms |
2.1 A |
Encoder |
20 ¥ìm fundamental; amplified sine output |
Resolution |
0.83 nm |
Accuracy(1,3) |
¡¾1.5 ¥ìm |
Bidirectional Repeatability(3) |
¡¾0.3 ¥ìm |
Straightness(4) |
¡¾2 ¥ìm |
Roll |
20 arc sec |
Pitch |
20 arc sec |
Yaw |
20 arc sec |
Maximum Speed |
4 mm/s |
Maximum Load(5) |
10 kg (requires use of integral pneumatic counterbalance) |
Moving Mass |
1.0 kg |
Wedge Ratio |
12:1 |
Stage Mass |
4.2 kg |
Material |
Aluminum |
Finish |
Black anodize hard cover; Hard coat (62 Rockwell Hardness) tabletop |
|
Ordering Example |
WaferMax Z |
-NC |
-LTAS |
|
Limit Switches |
Encoder |
WaferMax Z |
-NC -NO
|
-LTAS |
WaferMax Z |
WaferMax Z
|
Direct-drive vertical stage
|
Limits |
-NC
|
Normally closed end of travel limit switches (STANDARD)
|
-NO |
Normally open end of travel limit switches
|
Encoder |
-LTAS
|
Linear encoder; Amplified Sine Output
|
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