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ÁؼöÇÕ´Ï´Ù. |
| |
Total Travel |
25 mm |
50 mm |
100 mm |
150 mm |
Drive System |
Linear Brushless Servomotor |
Bus Voltage |
up to 160 VDC |
Continuous Current |
A pk |
up to 2.9 A |
A rms |
up to 2.1 A |
BEMF, line-line, max. |
V/m/sec |
3.77952 |
V/in/sec |
0.096 |
Force Constant, Sinusoidal Drive |
N/A(lb/A), pk |
3.29 (0.739) |
N/A(lb/A), rms |
4.65 (1.04) |
Resistance, 25¡ÆC, line-line |
Ohms |
5.2 |
Resistance, 125¡ÆC, line-line |
Ohms |
7.28 |
Inductance, line-line |
mH |
0.7 |
Magnetic Pole Pitch |
mm (inch) |
16 (0.63) |
Feedback |
Noncontact Linear Encoder |
Resolution |
LN |
1 nm |
|
LT |
5 nm |
Maximum Travel Speed(1) |
300 mm/s |
Maximum Linear Acceleration |
1 g -10 m/s2 (no load) |
Maximum Load(2) |
Horizontal |
15.0 kg |
Accuracy |
LN |
¡¾0.2 ¥ìm(3) ¡¾1 ¥ìm |
¡¾0.2 ¥ìm(3) ¡¾1 ¥ìm |
¡¾0.2 ¥ìm(3) ¡¾2 ¥ìm |
¡¾0.5 ¥ìm(3) ¡¾5 ¥ìm |
LT |
¡¾0.3 ¥ìm(3) ¡¾2 ¥ìm |
¡¾0.3 ¥ìm(3) ¡¾2 ¥ìm |
¡¾0.3 ¥ìm(3) ¡¾5 ¥ìm |
¡¾0.5 ¥ìm(3) ¡¾5 ¥ìm |
Repeatability
|
LN(3) |
¡¾50 nm |
LT |
¡¾50 nm(3); ¡¾100 nm |
Straightness and
Flatness(4) |
Differential |
0.25 ¥ìm/25 mm |
Max Deviation |
¡¾0.25 ¥ìm |
¡¾0.25 ¥ìm |
¡¾0.4 ¥ìm |
¡¾0.4 ¥ìm |
Pitch and Yaw |
¡¾0.25 arc sec/25 mm |
¡¾0.25 arc sec/25 mm |
¡¾0.25 arc sec/25 mm |
¡¾1.5 arc sec/25 mm |
Nominal Stage Weight |
4.5 kg |
5.5 kg |
6.4 kg |
12.7 kg |
Moving Mass |
1.9 kg |
4.8 kg |
Operating Pressure(5) |
80 psi ¡¾5 psi |
Air Consumption(6) |
<0.3 cfm @ 80 psi |
Construction |
Aluminum Body/Hardcoat |
|
|
|
|
|
|
| Notes: 1.
Maximum speed based on stage capability; maximum application velocity may be
limited by system data rate and system resolution. 2. Max load for XY
configuration is 10.0 kg. 3. Values with Aerotech controls and HAL
option. 4. Dependent on flatness of stage mounting surface. 5. To protect
air bearing against under-pressure, an in-line pressure switch is required and
tied to the contoller E-stop input. 6. Air supply must be clean, dry to 0¡Æ F
dew point, and filtered to 0.25 µm or better; recommend nitrogen at 99.99%
purity.
|
Àû¿ë ¿¹
|
FG1000-3D |
-100 |
-LT |
Series |
Travel (mm) |
Feedback |
|
-25 -50 -100 -150 |
-LT -LN -LT/lower -LN/lower -LT/upper -LN/upper -LT/vertical -LN/vertical |
FiberGlide 1000
Series Photonics Alignment and Assembly System |
FG1000-3D
|
Linear air bearing
positioner
|
Linear Stage
Travel (Z, X, Y) |
-25*
|
25 mm (1 in) travel
stage with linear motor
|
-50 |
50 mm (2 in) travel stage
with linear motor |
-100 -150**
|
100 mm (4 in) travel stage
with linear motor 150 mm (6 in) travel stage with linear
motor
|
*-25 can only be used in an XY configuration with
the -150 as the lower axis **-150 can only be used as the upper XY axis with
a -150 lower axis ***Z axis can only be -25
|
Feedback |
-LT
|
Linear encoder
feedback (10 nm resolution), amplified sine output
|
-LN |
High-accuracy linear
encoder feedback (2 nm resolution), amplified sine output |
-LT/lower |
LT option with lower axis
cable management |
-LN/lower |
LN option with lower axis
cable management |
-LT/upper |
LT option with upper axis
cable management |
-LN/upper |
LN option with upper axis
cable management |
-LT/vertical |
LT option with vertical
axis cable management |
-LN/vertical |
LN option with vertical
axis cable management | |