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ºñÁ¢ÃË direct drive
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¿Ïº®ÇÑ °ø¾Ð counterbalance
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¿¡¾î·ÎÅØÀÇ AVL1000Àº ´ëÇü ÇÏÁßÀ» À§ÇØ Z articulationÀ» ¿ä±¸ÇÏ´Â FPD¿Í °°Àº Àû¿ëºÐ¾ß¿¡¼ÀÇ ºñ¾àÀûÀÎ ¾àÁøÀ» º¸¿©ÁÝ´Ï´Ù. ³ôÀº ÇÏÁß °ü¼ºÀ» °¡Áø ´ÙÃà ½Ã½ºÅÛÀº ÀüüÀûÀÎ ±â°è¼º´ÉÀ» Á¦ÇÑÇÏ´Â ±â°èÀûÀÎ ¾ÈÁ¤¼º ¹®Á¦¿¡ Á÷¸éÇÒ ¼ö ÀÖ½À´Ï´Ù. AVL1000Àº ÀÌ·¯ÇÑ ¹®Á¦Á¡À» stage °ß°í¼ºÀ» Å©°Ô Áõ´ë½ÃŲ µ¶ÀÚÀûÀÎ µðÀÚÀÎÀ» ÅëÇØ Á¦°ÅÇÏ¿´½À´Ï´Ù. AVL1000Àº ³ÐÀº footprint¸¦ °¡Áö°í, º£¾î¸µ ±¸¼º¿ä¼Ò¸¦ °¡´ÉÇÑ ¸Ö¸® ¶³¾îÁö°Ô ÇÔÀ¸·Î¼ °ß°í¼ºÀ» Áõ°¡½Ãŵ´Ï´Ù. ÀÌ µðÀÚÀÎÀº ¿î¹ÝÀ» ÃæºÐÈ÷ ¹ß»ý½ÃÅ°°í, ¿ä±¸µÇÁö ¾ÊÀº ¿òÁ÷ÀÓÀ» ½ÇÁúÀûÀ¸·Î Á¦°ÅÇÏ´Â ±â°èÀûÀÎ ¿ä¼Ò¸¦ ÅëÇÕ½ÃÄ×½À´Ï´Ù.
¿ì¼öÇÑ ±â°è µðÀÚÀÎ AVL1000Àº Ãø¸é°ú ȸÀü¸éÀÇ ³ôÀº °µµ¸¦ ¾ò±â À§ÇØ ¾ÆÁÖ °ß°íÇÑ º£¾î¸µ¿¡ žÀçµÈ ¼â±â µðÀÚÀÎÀ» ÀÌ¿ëÇÕ´Ï´Ù. AVL1000ÀÇ ¸ðµç ±¸¼º¿ä¼Ò´Â 24½Ã°£ ¿¬¼ÓÀûÀÎ »ê¾÷ȯ°æ¿¡¼ ÀÛµ¿Çϵµ·Ï ¼±Á¤µÇ¾ú½À´Ï´Ù. Screw ±â¹Ý ¶Ç´Â piezo±â¹Ý ¼öÁ÷ stage¿Í ´Þ¸® AVL125´Â Á¤ºñ°¡ ÇÊ¿ä°¡ ¾øÀ¸¸ç ÀÌ°ÍÀº ¼ö³â°£ Ùí-°íÀå ÀÛµ¿À» º¸ÀåÇÕ´Ï´Ù.
Brushless Direct-Drive ÃÖ°íÀÇ positioning ¼º´ÉÀ» À§ÇØ, AVL1000Àº ¿¡¾î·ÎÅØÀÇ BLM½Ã¸®Áî brushless, slotless linear motor¸¦ »ç¿ëÇÕ´Ï´Ù. ÀÌ ¸ðÅÍ´Â brushless direct-drive ¸ðÅÍÀÇ ¸ðµç ÀåÁ¡À»-¸¶¸ðµÇ´Â brush¿Í Á¤ºñ¸¦ ¿äÇÏ´Â ±â¾î æê Üôî¤, ³ôÀº °¡¼Ó¼º, ºü¸¥ ¼Óµµ- °¡Áö°í ÀÖ½À´Ï´Ù. AVL1000Àº ¸ðÅÍ°¡ cogging force¸¦ ÀüÇô ¸¸µéÁö ¾Ê±â ¶§¹®¿¡ ³ôÀº ´ë¿ªÆø ÀÚµ¿ÃÊÁ¡ ÀÀ¿ëºÐ¾ß¿¡ ÀÌ»óÀûÀÔ´Ï´Ù.
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À¯¿¬ÇÑ Á¶ÇÕ ¿¡¾î·ÎÅØÀº ¶ÇÇÑ ¿Ïº®ÇÑ ÅëÇÕ ÆÑÅ°Áö¸¦ Á¦°øÇÏ´Â »óÈ£º¸¿ÏÀûÀÎ stage ½Ã½ºÅÛÀÇ Àüü Á¦Ç°±¸¼º°ú ´õºÒ¾î Æø³ÐÀº ¼º¸ amplifier¿Í ¼±Áø±â¼úÀÇ controller ±âÁ¾À» Á¦ÀÛÇÕ´Ï´Ù.
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Specifications
Model |
-1 |
-2 |
Travel |
1 mm |
2 mm |
Motor Type |
Linear Brushless Servomotor
(BLM-203-A) |
Bus Voltage |
up to 160 VDC |
Continuous Current |
Apk |
up to 8.7 A |
Arms |
up to 6.15 A |
Resolution(1) |
0.5 nm |
Accuracy(2) |
HALAR |
±1 µm |
Bidirectional Repeatability |
±0.25 µm |
Straightness/Flatness |
±1 µm |
Roll |
3 arc sec |
6 arc sec |
Pitch |
3 arc sec |
6 arc sec |
Yaw |
3 arc sec |
6 arc sec |
Maximum Load |
50 kg (requires use of integral pneumatic
counterbalance) |
Moving Mass |
10 kg |
Wedge Ratio |
20:1 |
Stage Mass |
29 kg |
Material |
Aluminum |
Finish |
Black Anodize Cover; Hardcoat (62 Rockwell Hardness)
Tabletop |
|
Ordering Example |
AVL1000 |
-1 |
-NC |
-LTAS |
Series |
Travel Options |
Limits |
Encoder |
|
1 mm 2 mm |
-NC -NO |
-LTAS |
AVL1000 |
AVL1000 |
Direct-drive vertical stage
|
Travel Options |
-1 |
1 mm travel |
-2 |
2 mm travel |
Limits |
-NC |
Normally-closed end-of-travel limit switches (standard) |
-NO |
Normally-open end-of-travel limit switches
|
Encoder |
-LTAS |
Linear encoder; 20 ?m fundamental; amplified sine output |
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