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Mechanical Specifications
Model |
ANT130-035-L-Z |
ANT130-035-L-Z-PLUS |
ANT130-060-L-Z |
ANT130-060-L-Z-PLUS |
Travel |
35 mm |
35 mm |
60 mm |
60 mm |
Accuracy(1) |
±3 µm |
±300 nm |
±3 µm |
±300 nm |
Resolution |
2 nm |
2 nm |
2 nm |
2 nm |
Bidirectional Repeatability(1) |
±100 nm |
±75 nm |
±100 nm |
±75 nm |
Unidirectional Repeatability |
±50 nm |
±50 nm |
±50 nm |
±50 nm |
Straightness(1) |
±2.0 µm |
±2.0 µm |
±2.0 µm |
±2.0 µm |
Flatness(1) |
±2.0 µm |
±2.0 µm |
±2.0 µm |
±2.0 µm |
Pitch |
10 arc sec |
10 arc sec |
10 arc sec |
10 arc sec |
Roll |
10 arc sec |
10 arc sec |
10 arc sec |
10 arc sec |
Yaw |
5 arc sec |
5 arc sec |
5 arc sec |
5 arc sec |
Maximum Speed |
200 mm/s |
200 mm/s |
200 mm/s |
200 mm/s |
Maximum Acceleration |
1 g (No Load) |
1 g (No Load) |
1 g (No Load) |
1 g (No Load) |
In-Position Stability(2) |
<2 nm |
<2 nm |
<2 nm |
<2 nm |
Maximum Force (Continuous) |
23 N |
23 N |
23 N |
23 N |
Load Capacity(3) |
Vertical |
10 kg |
10 kg |
10 kg |
10 kg |
Moving Mass |
1.2 kg |
1.2 kg |
1.4 kg |
1.4 kg |
Stage Mass |
4.3 kg |
4.3 kg |
5.2 kg |
5.2 kg |
Material |
Aluminum Body/Black Hardcoat Finish |
MTBF (Mean Time Between Failure) |
30,000 Hours |
? Specifications are for single-axis systems measured 25 mm above the
tabletop. Performance of combined multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications. ?
-PLUS requires the use of an Aerotech controller.
Electrical Specifications
Drive System |
Brushless Linear Servomotor |
Feedback |
Noncontact Linear Encoder |
Maximum Bus Voltage |
±40 VDC |
Limit Switches |
5 V, Normally Closed |
Home Switch |
Near Center |
Recommended Controller
Multi-Axis |
A3200 |
Npaq MXR Npaq MR-MXH Ndrive
ML-MXH |
Ensemble |
Epaq MXH Epaq MR-MXH Ensemble
ML-MXH |
Single Axis |
Soloist |
Soloist ML-MXH |
Note: To ensure the achievement and repeatability of specifications over an
extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available.
Please consult Aerotech for more information.
-
|
ANT130-L-Z Series Vertical Stage |
ANT130-LZ |
Aerotech¡¯s nanotranslation crossed-roller vertical positioner
|
Linear Stage Travel |
ANT130-035-L-Z |
35 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits |
ANT130-035-L-Z-PLUS |
35 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version) |
ANT130-060-L-Z |
60 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits |
ANT130-060-L-Z-PLUS |
60 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version) |
Options |
-25DU |
Single 25-pin D (standard) |
-4DU-25DU |
Motor 4-pin HPD; feedback 25-pin D | |