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°í¼º´É, ºñ¿ëÈ¿À²ÀûÀÎ Actuator
100mm¿¡¼ 1.5m±îÁöÀÇ À̵¿±¸°£ ¹üÀ§
5g±îÁö °¡¼Ó ¿ª·®
5m/s±îÁö ¼Óµµ ¿ª·®
270.7N±îÁö ÃÖ´ë Áö¼Ó·Â
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| |
|
ACT115DL |
|
Mechanical
Specifications |
-0100 |
-0200 |
-0300 |
-0400 |
-0500 |
| Travel
|
100 mm |
200 mm |
300 mm |
400 mm |
500 mm |
| Accuracy(1) |
Uncalibrated |
¡¾7 um (¡¾280 uin) |
¡¾13 um (¡¾520 uin) |
¡¾19 um (¡¾760 uin) |
¡¾25 um (¡¾1000 uin) |
¡¾31 um (¡¾1240 uin) |
| Calibrated(2) |
¡¾2 um (¡¾80 uin) |
¡¾2 um (¡¾80 uin) |
¡¾2 um (¡¾80 uin) |
¡¾2 um (¡¾80 uin) |
¡¾3 um (¡¾120 uin) |
| Resolution |
0.005 - 1 um |
Repeatability
(Bi-Directional)(1,3) |
¡¾1 um |
| Maximum Speed(4) |
5 m/s |
| Maximum Acceleration (Continuous)(4) |
3 g |
| Maximum Force (Continuous) |
20
psi |
105.5 N |
| No
Air |
68.2 N |
| Load Capacity(5) |
Horizontal |
20 kg (44 lb) |
| Side
|
10 kg (22 lb) |
| Moving
Mass |
1.4 kg (3.0 lb) |
| Stage
Mass |
7.3 kg (16.0 lb) |
9.1 kg (20.0 lb) |
10.9 kg (24.0 lb) |
12.7 kg (28.0 lb) |
14.5 kg (32.0 lb) |
| Material |
Aluminum (Clear Anodize Base/Black Anodize Tabletop)
|
MTBF
(Mean Time
Between Failure) |
20,000 Hours | Notes:
1. Testing conducted only when "-CERTIFIED"
metrology option is ordered.
2. Calibration available with HALAR
option.
3. Bi-directional repeatability specification listed requires
resolution of 0.1 µm or finer. Specification is ¡¾2 µm with resolution of 0.5 µm.
Coarser resolutions will result in reduced bi-directional repeatability
performance.
4. Maximum velocity and acceleration specifications assume a
small payload. As payload increases, the maximum attainable velocity and
acceleration will decrease. Maximum application velocity may be limited by
system data rate and resolution.
5. Axis orientation for on-axis loading is
listed.
6. Specifications are for single-axis systems measured 25 mm above
the tabletop. Consult factory for non-standard
applications.
|
|
ACT115DL |
|
Mechanical
Specifications |
-0600 |
-0800 |
-1000 |
-1200 |
-1500 |
| Travel
|
600 mm |
800 mm |
1000 mm |
1200 mm |
1500 mm |
| Accuracy(1) |
Uncalibrated |
¡¾36 um (¡¾1440 uin) |
¡¾44 um (¡¾1760 uin) |
¡¾50 um (¡¾2000 uin) |
¡¾55 um (¡¾2200 uin) |
¡¾60 um (¡¾2400 uin) |
| Calibrated(2) |
¡¾3 um (¡¾120 uin) |
¡¾3 um (¡¾120 uin) |
¡¾5 um (¡¾200 uin) |
¡¾5 um (¡¾200 uin) |
¡¾5 um (¡¾200 uin) |
| Resolution |
0.005 - 1 um |
| Repeatability (Bi-Directional)(1,3) |
¡¾1 um |
| Maximum Speed(4) |
5 m/s |
| Maximum Acceleration (Continuous)(4) |
3 g |
| Maximum Force (Continuous) |
20
psi |
105.5 N |
| No
Air |
68.2 N |
| Load Capacity(5) |
Horizontal |
20 kg (44 lb) |
| Side
|
10 kg (22 lb) |
| Moving
Mass |
1.4 kg (3.0 lb) |
| Stage
Mass |
16.3 kg (36.0 lb) |
20.0 kg (44.0 lb) |
23.6 kg (52.0 lb) |
27.2 kg (60.0 lb) |
32.7 kg (72.0 lb) |
| Material |
Aluminum (Clear Anodize Base/Black Anodize Tabletop)
|
| MTBF
(Mean Time Between Failure) |
20,000 Hours |
Notes:
1. Testing conducted only when "-CERTIFIED"
metrology option is ordered.
2. Calibration available with HALAR
option.
3. Bi-directional repeatability specification listed requires
resolution of 0.1 µm or finer. Specification is ¡¾2 µm with resolution of 0.5 µm.
Coarser resolutions will result in reduced bi-directional repeatability
performance.
4. Maximum velocity and acceleration specifications assume a
small payload. As payload increases, the maximum attainable velocity and
acceleration will decrease. Maximum application velocity may be limited by
system data rate and resolution.
5. Axis orientation for on-axis loading is
listed.
6. Specifications are for single-axis systems measured 25 mm above
the tabletop. Consult factory for non-standard
applications.
|
Electrical
Specifications |
ACT115DL |
| Drive System |
Brushless Linear Servomotor (BLMC-142-A) |
| Feedback |
Noncontact Linear Encoder |
| Maximum Bus Voltage |
320 VDC |
| Limit Switches |
5 V, Normally Closed |
| Home Switch |
Near Center |
|
Recommended
Controller |
| Multi-Axis |
A3200 |
Ndrive CP / Ndrive HPe/Npaq |
| Ensemble |
Ensemble CP/Ensemble HPe |
| Single Axis |
Soloist |
Soloist CP/Soloist HPe |
 
|
|
ACT140DL |
|
Mechanical
Specifications |
-0100 |
-0200 |
-0300 |
-0400 |
-0500 |
| Travel |
100 mm |
200 mm |
300 mm |
400 mm |
500 mm |
| Accuracy(1) |
Uncalibrated |
¡¾7 um (¡¾280 uin) |
¡¾13 um (¡¾520 uin) |
¡¾19 um (¡¾760 uin) |
¡¾25 um (¡¾1000 uin) |
¡¾31 um (¡¾1240 uin) |
| Calibrated(2) |
¡¾2 um (¡¾80 uin) |
¡¾2 um (¡¾80 uin) |
¡¾2 um (¡¾80 uin) |
¡¾2 um (¡¾80 uin) |
¡¾3 um (¡¾120 uin) |
| Resolution |
0.005 - 1 um |
| Repeatability (Bi-Directional)(1,3) |
¡¾1 um |
| Maximum Speed(4) |
5 m/s |
| Maximum Acceleration (Continuous)(4) |
5 g |
| Maximum Force (Continuous) |
20 psi |
173.2 N |
| No Air |
110.5 N |
| Load Capacity(5) |
Horizontal |
40 kg (88 lb) |
| Side |
20 kg (44 lb) |
| Moving Mass |
2.5 kg (5.5 lb) |
| Stage Mass |
13.8 kg (30.3 lb) |
17.0 kg (37.4 lb) |
19.5 kg (43.0 lb) |
22.7 kg (50.0 lb) |
25.3 kg (55.6 lb) |
| Material |
Aluminum (Clear Anodize Base/Black Anodize Tabletop)
|
| MTBF (Mean Time Between Failure) |
20,000 Hours |
Notes:
1. Testing conducted only when "-CERTIFIED"
metrology option is ordered.
2. Calibration available with HALAR
option.
3. Bi-directional repeatability specification listed requires
resolution of 0.1 µm or finer. Specification is ¡¾2 µm with resolution of 0.5 µm.
Coarser resolutions will result in reduced bi-directional repeatability
performance.
4. Maximum velocity and acceleration specifications assume a
small payload. As payload increases, the maximum attainable velocity and
acceleration will decrease. Maximum application velocity may be limited by
system data rate and resolution.
5. Axis orientation for on-axis loading is
listed.
6. Specifications are for single-axis systems measured 25 mm above
the tabletop. Consult factory for non-standard
applications.
|
|
ACT140DL |
|
Mechanical
Specifications |
-0600 |
-0800 |
-1000 |
-1200 |
-1500 |
| Travel
|
600 mm |
800 mm |
1000 mm |
1200 mm |
1500 mm |
| Accuracy(1) |
Uncalibrated |
¡¾36 um (¡¾1440 uin) |
¡¾44 um (¡¾1760 uin) |
¡¾50 um (¡¾2000 uin) |
¡¾55 um (¡¾2200 uin) |
¡¾60 um (¡¾2400 uin) |
| Calibrated(2) |
¡¾3 um (¡¾120 uin) |
¡¾3 um (¡¾120 uin) |
¡¾5 um (¡¾200 uin) |
¡¾5 um (¡¾200 uin) |
¡¾5 um (¡¾200 uin) |
| Resolution |
0.005 - 1 um |
| Repeatability (Bi-Directional)(1,3) |
¡¾1 um |
| Maximum Speed(4) |
5 m/s |
| Maximum Acceleration (Continuous)(4) |
5 g |
| Maximum Force (Continuous) |
20
psi |
173.2 N |
| No
Air |
110.5 N |
| Load Capacity(5) |
Horizontal |
40 kg (88 lb) |
| Side
|
20 kg (44 lb) |
| Moving
Mass |
2.5 kg (5.5 lb) |
| Stage
Mass |
28.5 kg (62.7 lb) |
34.3 kg (75.4 lb) |
40.7 kg (89.4 lb) |
46.4 kg (102.0 lb) |
55.4 kg (121.8 lb) |
| Material |
Aluminum (Clear Anodize Base/Black Anodize Tabletop)
|
| MTBF
(Mean Time Between Failure) |
20,000 Hours | Notes:
1. Testing conducted only when "-CERTIFIED"
metrology option is ordered.
2. Calibration available with HALAR
option.
3. Bi-directional repeatability specification listed requires
resolution of 0.1 µm or finer. Specification is ¡¾2 µm with resolution of 0.5 µm.
Coarser resolutions will result in reduced bi-directional repeatability
performance.
4. Maximum velocity and acceleration specifications assume a
small payload. As payload increases, the maximum attainable velocity and
acceleration will decrease. Maximum application velocity may be limited by
system data rate and resolution.
5. Axis orientation for on-axis loading is
listed.
6. Specifications are for single-axis systems measured 25 mm above
the tabletop. Consult factory for non-standard
applications.
|
Electrical
Specifications |
ACT140DL |
| Drive System |
Brushless Linear Servomotor (BLM-142-A) |
| Feedback |
Noncontact Linear Encoder |
| Maximum Bus Voltage |
320 VDC |
| Limit Switches |
5 V, Normally Closed |
| Home Switch |
Near Center |
|
Recommended
Controller |
| Multi-Axis |
A3200 |
Ndrive CP / Ndrive HPe/Npaq |
| Ensemble |
Ensemble CP/Ensemble HPe |
| Single Axis |
Soloist |
Soloist CP/Soloist HPe |
 
|
ACT165DL |
|
Mechanical
Specifications |
-0100 |
-0200 |
-0300 |
-0400 |
-0500 |
| Travel
|
100 mm |
200 mm |
300 mm |
400 mm |
500 mm |
| Accuracy(1) |
Uncalibrated |
¡¾7 ¥ìm (¡¾280 ¥ìin) |
¡¾13 ¥ìm (¡¾520 ¥ìin) |
¡¾19 ¥ìm (¡¾760 ¥ìin) |
¡¾25 ¥ìm (¡¾1000 ¥ìin) |
¡¾31 ¥ìm (¡¾1240 ¥ìin) |
| Calibrated(2) |
¡¾2 ¥ìm (¡¾80 ¥ìin) |
¡¾2 ¥ìm (¡¾80 ¥ìin) |
¡¾2 ¥ìm (¡¾80 ¥ìin) |
¡¾2 ¥ìm (¡¾80 ¥ìin) |
¡¾3 ¥ìm (¡¾120 ¥ìin) |
| Resolution |
0.005 - 1 ¥ìm |
| Repeatability (Bi-Directional)(1,3) |
¡¾1 ¥ìm |
| Maximum Speed(4) |
5 m/s |
| Maximum Acceleration (Continuous)(4) |
5 g |
| Maximum Force (Continuous) |
20
psi |
270.7 N |
| No
Air |
150.0 N |
| Load Capacity(5) |
Horizontal |
60 kg (132 lb) |
| Side
|
30 kg (66 lb) |
| Moving
Mass |
3.0 kg (6.6 lb) |
| Stage
Mass |
23.4 kg (51.6 lb) |
29.1 kg (64.2 lb) |
33.4 kg (73.6 lb) |
39.0 kg (86.0 lb) |
44.7 kg (98.5 lb) |
| Material |
Aluminum (Clear Anodize Base/Black Anodize Tabletop)
|
| MTBF
(Mean Time Between Failure) |
20,000 Hours | Notes:
1. Testing conducted
only when "-CERTIFIED" metrology option is ordered.
2. Calibration available
with HALAR option.
3. Bi-directional repeatability specification listed
requires resolution of 0.1 µm or finer. Specification is ¡¾2 µm with resolution
of 0.5 µm. Coarser resolutions will result in reduced bi-directional
repeatability performance.
4. Maximum velocity and acceleration
specifications assume a small payload. As payload increases, the maximum
attainable velocity and acceleration will decrease. Maximum application velocity
may be limited by system data rate and resolution.
5. Axis orientation for
on-axis loading is listed.
6. Specifications are for single-axis systems
measured 25 mm above the tabletop. Consult factory for non-standard
applications.
|
|
ACT165DL |
|
Mechanical
Specifications |
-0600 |
-0800 |
-1000 |
-1200 |
-1500 |
| Travel
|
600 mm |
800 mm |
1000 mm |
1200 mm |
1500 mm |
| Accuracy(1) |
Uncalibrated |
¡¾36 ¥ìm (¡¾1440 ¥ìin) |
¡¾44 ¥ìm (¡¾1760 ¥ìin) |
¡¾50 ¥ìm (¡¾2000 ¥ìin) |
¡¾55 ¥ìm (¡¾2200 ¥ìin) |
¡¾60 ¥ìm (¡¾2400 ¥ìin) |
| Calibrated(2) |
¡¾3 ¥ìm (¡¾120 ¥ìin) |
¡¾3 ¥ìm (¡¾120 ¥ìin) |
¡¾5 ¥ìm (¡¾200 ¥ìin) |
¡¾5 ¥ìm (¡¾200 ¥ìin) |
¡¾5 ¥ìm (¡¾200 ¥ìin) |
| Resolution |
0.005 - 1 ¥ìm |
| Repeatability (Bi-Directional)(1,3) |
¡¾1 ¥ìm |
| Maximum Speed(4) |
5 m/s |
| Maximum Acceleration (Continuous)(4) |
5 g |
| Maximum Force (Continuous) |
20
psi |
270.7 N |
| No
Air |
150.0 N |
| Load Capacity(5) |
Horizontal |
60 kg (132 lb) |
| Side
|
30 kg (66 lb) |
| Moving
Mass |
3.0 kg (6.6 lb) |
| Stage
Mass |
48.9 kg (107.8 lb) |
60.3 kg (132.9 lb) |
70.2 kg (154.8 lb) |
80.1 kg (176.6 lb) |
95.7 kg (211.0 lb) |
| Material |
Aluminum (Clear Anodize Base/Black Anodize Tabletop)
|
| MTBF
(Mean Time Between Failure) |
20,000 Hours | Notes:
1. Testing conducted
only when "-CERTIFIED" metrology option is ordered.
2. Calibration available
with HALAR option.
3. Bi-directional repeatability specification listed
requires resolution of 0.1 µm or finer. Specification is ¡¾2 µm with resolution
of 0.5 µm. Coarser resolutions will result in reduced bi-directional
repeatability performance.
4. Maximum velocity and acceleration
specifications assume a small payload. As payload increases, the maximum
attainable velocity and acceleration will decrease. Maximum application velocity
may be limited by system data rate and resolution.
5. Axis orientation for
on-axis loading is listed.
6. Specifications are for single-axis systems
measured 25 mm above the tabletop. Consult factory for non-standard
applications.
|
Electrical
Specifications |
ACT165DL |
| Drive System |
Brushless Linear Servomotor (BLMH-142-A) |
| Feedback |
Noncontact Linear Encoder |
| Maximum Bus Voltage |
320 VDC |
| Limit Switches |
5 V, Normally Closed |
| Home Switch |
Near Center |
|
Recommended
Controller |
| Multi-Axis |
A3200 |
Ndrive CP / Ndrive HPe/Npaq |
| Ensemble |
Ensemble CP/Ensemble HPe |
| Single Axis |
Soloist |
Soloist CP/Soloist HPe |
 
|
|
ACT115DL
ACT140DL
ACT165DL
|
|
Àû¿ë ¿¹
(³ì»öÀº ¿¡¾î·ÎÅØÀÇ ºü¸¥ ³³±â ÇÁ·Î±×·¥
¿É¼ÇÀÓ.)
|
ACT115DL |
-0300 |
-TTM |
-AS |
-NC-5V |
-CMS0300-H |
-FC-EP |
-NO PLOTS |
|
|
Series |
Travel (mm) |
Tabletop |
Linear Feedback |
Limits |
Cable Management |
Options |
Metrology |
Accessories |
|
ACT115DL
ACT140DL
ACT165DL |
-0100
-0200
-0300
-0400
-0500
-0600
-0800
-1000
-1200
-1500 |
-TTM |
-AS
-0.1
-0.5 |
-NC-5V
-NCA-5V |
-CONN-NH
-CONN-H
-CMSXXXX-H |
-FC
-EP
-BRACKET |
-NO
PLOTS
-PLOTS |
-HALAR |
|
ACTxxxDL Series Linear Motor
Actuator |
|
ACT115DL |
Linear actuator with BLMC-142-A
motor |
|
ACT140DL |
Linear actuator with BLM-142-A
motor |
|
ACT165DL |
Linear actuator with BLMH-142-A
motor
|
|
Travel |
|
-0100 |
100 mm travel linear actuator |
|
-0200 |
200 mm travel linear actuator |
|
-0300 |
300 mm travel linear actuator |
|
-0400 |
400 mm travel linear actuator |
|
-0500 |
500 mm travel linear actuator |
|
-0600 |
600 mm travel linear actuator |
|
-0800 |
800 mm travel linear actuator |
|
-1000 |
1000 mm travel linear actuator |
|
-1200 |
1200 mm travel linear actuator |
|
-1500 |
1500 mm travel linear
actuator
|
|
Tabletop |
|
-TTM |
Metric dimension mounting pattern and holes
(standard)
|
|
Standard Linear
Feedback |
|
-AS |
Linear optical encoder; 20 ¥ìm/Vpp output
|
|
-0.1 |
Linear optical encoder; 0.1 ¥ìm line driver
output
|
|
-0.5 |
Linear optical encoder; 0.5 µm line driver
output |
|
Limits |
|
-NC-5V |
5 V normally-closed end of travel limit switches
with fixed locations (standard) |
|
-NCA-5V |
5 V normally-closed end of travel limit switches
with adjustable location
|
|
Cable Management |
|
-CONN-NH |
150 mm (6 inch) connectorized leads from carriage;
no cable management system; no linear motor Halls |
|
-CONN-H |
150 mm (6 inch) connectorized leads from carriage;
no cable management system; linear motor Halls |
|
-CMSXXXX-H |
Cable management system for 100 mm to 1500 mm
single-axis applications; linear motor Halls
|
|
Options |
|
-FC |
Includes air cooling of linear motor forcer (20 psi
compressed air supply required) |
|
-EP |
End plates mounted on linear actuator
base
|
|
-BRACKET |
Bulkhead bracket mounting kit for installing motor
and feedback connectors onto carriage (for use with -CONN-NH and -CONN-H
options); installation of kit by end user is required |
|
Metrology |
|
-NO PLOTS |
No metrology testing of stage; no performance plots
provided |
|
-PLOTS |
Accuracy and repeatability testing of uncalibrated
stage; performance plots provided |
|
Accessories (to be ordered as separate line
item) |
|
-HALAR |
High-accuracy system; linear error correction for
accuracy and repeatability | |
ACT Linear
