FiberGrate 2000 Fiber Optics Subsystem
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Feedback and Control System
Aerotech`s LZR series laser interferometers provide high stability, high
resolution (0.3 nm) feedback. Designed for use with Aerotech`s Automation 3200
series controller, the interface between the interferometer and control systems
is seamless. The laser is positioned at the height of the fiber and mask to
eliminate Abbe error, resulting in exceptional accuracy. For less stringent
applications, two different noncontact linear encoders (2 nm or 10 nm
resolution) are offered. A wide selection of state-of-the-art controllers are
available. Options range from single-axis, stand-alone controllers to the
Automation 3200 software-only controller capable of 32 axes of synchronized
control. All of Aerotech`s controllers offer position synchronized output pulses
to control the laser. In addition, real-time position information may be logged
on-board the controller, or read over high-speed parallel or serial
interfaces.
Options
The FiberGrate may be configured with standard or custom granite, as well as
vibration isolation systems. Additional indexing axes are available and are
readily interfaced with the control and drive system. Convenient rack- or
panelmount amplifiers are included with all systems. All systems have provisions
for customer cabling.
Aerotech`s expert technical staff is experienced in custom system designs and
will work with you to generate a system to meet the unique needs of your
application. |
Basic Model |
FiberGrate 2000 |
Total Travel |
100 mm to 1.2 m (4 in to 48 in) |
Drive System |
Linear Brushless Servomotor - BLMC-192-A |
Feedback |
Laser Interferometer (LZR) or Noncontact Linear Encoder (LN or
LT) |
Resolution |
LZR |
0.3 nm - 79 nm (0.012 µin - 3.2 µin) |
LN |
2 nm (0.08 µin) |
LT |
10 nm (0.4 µin) |
Maximum Travel Speed(1) |
500 mm/s (20 in/s) |
Maximum Load |
40.0 kg (90.0 lb) |
Overall Accuracy |
LZR |
±1.5 ppm |
LN(2) |
±0.5 µm (±20 µin) - ±1.0 µin (±40 µin) |
LT(2) |
±1 µm (±40 µin) - ±2 µin (±80 µin) |
Repeatability |
LZR |
±5 nm (±0.2 µin) |
LN |
±0.05 µm (±2 µin) - ±0.2 µin (±8 µin) |
LT |
±0.1 µm (±4 µin) - ±0.4 µin (±16 µin) |
Straightness and Flatness |
Differential |
±0.25 µm/25 mm (±10 µin/1 in) |
Maximum Deviation |
±0.25 µm (±10 µin) - ±5.0 µm (±200 µin) |
Pitch/Roll/Yaw |
±0.25 µm/25 mm |
Operating Pressure(3) |
80 psi ±5 psi |
Air Consumption(4) |
<1 cfm @ 80 psi |
Granite |
150 mm to 200 mm thickness laboratory grade |
Isolation System |
Air Isolation System |
-
|
FiberGrate 2000
|
Ordering Example
FG2000 |
-1200 |
-LZR |
-GRANITE |
Ordering Options
Series |
Travel (mm) |
Feedback |
Options |
FG2000 |
-100 -200 -300 -400 -500 -750 -1000 -1200 |
-LZR -LN -LT |
-GRANITE -ISOLATION |
FiberGrate 2000 Series Fiber Bragg Grating
Positioner
Option |
Description |
FG2000 |
Linear air bearing fiber/mask positioner. |
Note: Requires clean, dry air supply. In-line
under-pressure switch required.
|
Linear Stage Travel
Option |
Description |
-100 |
100 mm (4 in) travel stage with linear
motor |
-200 |
200 mm (8 in) travel stage with linear motor |
-300 |
300 mm (12 in) travel stage with linear motor |
-400 |
400 mm (16 in) travel stage with linear motor |
-500 |
500 mm (20 in) travel stage with linear motor |
-750 |
750 mm (30 in) travel stage with linear motor |
-1000 |
1000 mm (40 in) travel stage with linear motor |
-1200 |
1200 mm (48 in) travel stage with linear
motor
|
Feedback
Option |
Description |
-LZR |
Laser interferometer feedback (0.3 nm feedback); includes
environmental compensation package |
-LNxxAS |
High-accuracy linear encoder feedback (2 nm
resolution) |
-LTxxAS |
Linear encoder feedback (10 nm resolution) |
Note: Specify travel length `xx` in
cm
|
Controller Platform
Option |
Description |
-A3200 |
Automation 3200 software-only controller; linear amplifier,
cables, software included |
See Motion Controllers section for
specifications. |
Options
Option |
Description |
-GRANITE |
Granite to accommodate stage and customer fixturing.
Requires user-approved drawing (ESxxxxx) to specify user-defined mounting
holes. |
-ISOLATION |
Vibration isolation system. Requires GRANITE
option. | |