Semiconductor > Aerotech

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Semiconductor

Precision Motion Control Beyond the Limits of Semiconductor Manufacturing

Aerotech delivers solutions optimized for semiconductor processes—including lithography, inspection, metrology, and packaging—to maximize productivity and yield while ensuring nanometer-level precision and long-term reliability.

Push Beyond the Limits of Wafer and Chip Manufacturing

Aerotech precision motion control technology forms the core of advanced semiconductor manufacturing equipment.

Enabling today’s technology and preparing for tomorrow’s innovation.

Proven by the Numbers

01

45+ Years

Supporting Precision Semiconductor Manufacturing and Inspection Equipment
02

3 Nanometers

Semiconductor process technology nodes supported by Aerotech systems
03

10⁻⁹ hPa

Proven experience delivering vacuum environments tailored for advanced semiconductor processes

Increased Productivity

Production-ready automation subsystems maximize throughput and yield without compromising accuracy.
Precision

Nanometer-level motion control meets the extreme tolerances of next-generation semiconductor manufacturing.
Reliability

Advanced motion technologies ensure stable, long-term operation in continuous production environments.
Global Service & Support

A global expert network supports every stage—from design to production and ongoing operation.